Long range detection of wafer
The long-range laser BGS sensor TOF‑L Series can detect the presence of a wafer on the robot hand. It can detect the wafer even when the wafer position varies within a range of 0 to 4.5 meters.
Products Used
-
Compact, Long-range TOF Sensors
TOF-L Series
Ultra-compact long-distance detection sensor
Application Examples for Semiconductor
Contact Us
Our experts quickly deliver the best plan for your needs and provide continuous support throughout the process.
Product Inquiry / Technical Support- Download List
- 20