Detecting edge of wafer frames
The BGS-HL Series detects the edges of wafer frames. The BGS-HL25T2 can detect very thin objects such as wafer frames due to its small spot size of φ1 mm at a distance of 250 mm.
Products Used
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High-accuracy Laser Sensors
BGS-HL/BGS-HDL Series
High resolution BGS laser sensor
Application Examples for Semiconductor
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