Silicon wafer misalignment detection
The BGS-HDL Series enables detection of silicon wafer misalignment on a wafer stage. Misaligned wafers can be up to 5 mm higher than normal, while the BGS-HDL05T is capable of detecting height differences of 0.08 mm, ensuring high-accuracy performance.
Products Used
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High-accuracy Laser Sensors
BGS-HL/BGS-HDL Series
High resolution BGS laser sensor
Application Examples for Semiconductor
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