Verification of vacuum chamber lid opening/closing

Leaks can be prevented in advance by using the laser displacement sensor CD2H Series to measure the opening, closing, lift, and tilt of a vacuum chamber lid. The CD2H Series is compact and has a built-in amplifier while still offering long range measurement capability up to 1,200 mm. It also supports IO-Link communication, enabling high accuracy measurements unaffected by noise.

• Laser Displacement Sensors

  CD2H Series

  Best-in-class*, All-in-one Middle-range Sensors