Wafer alignment control

Wafer alignment is controlled using the D4RF Series digital fiber-optic sensor and NF-TK77 fiber-optic cable. Since the NF-TK77 has an allowable bend radius of just 1 mm, it can be routed through narrow gaps in the equipment, allowing wiring in minimal space. Moreover, stable detection is achieved without any risk of breaking.

• Fiber-Optic Cables

  NF Series Flexible type (R1 mm, R2 mm)

  Easy to handle Fiber-Optic Cables with a bending radius of 1 mm or 2 mm

  

• Fiber-Optic Sensors

  D4RF/D4IF Series

  Easy-to-Read, Easy-to-Use, Fiber-Optic Sensors