Deflection measurement of dicing saws
The CDX Series of laser displacement sensors measure deflection of dicing saws. With a spot size of ø30 μm, the CDX-30A can be used for measurement of both the side of the blade and the narrow end surface. This allows for high-accuracy measurement for not only width but also height.
Products Used
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Ultra High-Accuracy Laser Displacement Sensors
CDX Series
World’s No. 1 Linearity Developed image sensor: ATMOS Direct Ethernet connection Equipped with a Web Server
Application Examples for Semiconductor
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