Measurement of tray expansion in the chamber

The degree of expansion of a tray inside the sputtering heat chamber is measured through the glass using a CD33-250□ laser displacement sensor. Despite its low cost, the CD33-250□ achieves repeatability of 75 µm and can measure at distances up to 400 mm, allowing for accurate measurement of tray deformation.

• Small Laser Displacement Sensors

  CD33 Series

  Half-palm size. Ideal for built-in use with smaller machines