Wafer orientation measurement

The CD33-L30* laser displacement sensors can be used to measure the orientation of wafers on a robot arm. As they are specular reflection type sensors, the CD33-L30* enable accurate orientation measurement even for specular objects such as wafers.

• Small Laser Displacement Sensors

  CD33 Series

  Half-palm size. Ideal for built-in use with smaller machines

  

• Displacement Sensor Communication Units

  UQ1 Series

  Can be connected to Mitsubishi Electric PLCs The industry’s first displacement sensor control unit