Counting wafers
Whether a cassette contains the specified number of wafers is counted. A small spot size of Ø2 mm at a distance of 2 m and a high degree of straightness facilitates stable wafer counting unaffected by diffraction of light.
Products Used
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Digital Amplifier Separate Type
DS Series
Water resistant sensor head usable even in water-splashing areas Various sensor heads Visible red laser Coaxial reflective design
Application Examples for Semiconductor
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