Measurement of warpage of metal frame
The CD5‑W500 laser displacement sensor measures warpage of semiconductor metal frames inside a vacuum chamber. With a measurement range of 500 ± 200 mm, the CD5‑W500 allows long‑distance measurement through the chamber’s view port.
Products Used
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High-performance Multi-unit Laser Displacement Sensors
CD5 Series
Next level integration of accuracy, stability, and operability
Application Examples for Semiconductor
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