Controlling depth of annealing

The depth of annealing is controlled by measuring the height of the silicon substrate using the CD5 Series laser displacement sensor. The specular reflection type CD5-L25A can measure the height with a repeat accuracy of 0.37 μm, enabling accurate measurement of the annealing depth and precise control.

• High-performance Multi-unit Laser Displacement Sensors

  CD5 Series

  Next level integration of accuracy, stability, and operability