Measurement of warpage of exposure mask

In the mask transfer process, the distance to the exposure mask is measured and used to control the vacuum pick‑and‑place robot, preventing damage to the high‑value mask. Because the CD33 CMOS laser displacement sensor lineup includes a specular‑reflection type, the surface position of transparent exposure masks can be measured with high accuracy, enabling damage‑free transfer.

• Small Laser Displacement Sensors

  CD33 Series

  Half-palm size. Ideal for built-in use with smaller machines