Glass substrate warpage measurement

The CDX Series of laser displacement sensors measure warpage of glass substrates. The specular reflection type CDX-L15A is capable of measuring the warpage of transparent glass substrates in units as small as 0.25 μm. In addition, high-speed measurement is possible thanks to a maximum sampling period of 12.5 μs, enabling sampling that is up to eight times faster than conventional models.

• Ultra High-Accuracy Laser Displacement Sensors

  CDX Series

  World’s No. 1 Linearity Developed image sensor: ATMOS Direct Ethernet connection Equipped with a Web Server