Measurement of thickness of sputtering target

The thickness of a sputtering target is measured with the CD5-30 laser displacement sensor. True measurement stability is achieved thanks to OPTEX FA’s newly developed “Tri-CORE” technology. In specular reflective mode, the sensor delivers repeatability of 0.1 µm, enabling high-precision measurement. This suppresses sputtering target unevenness and contributes to improved accuracy during film deposition.

• High-performance Multi-unit Laser Displacement Sensors

  CD5 Series

  Next level integration of accuracy, stability, and operability