The CDX series of laser displacement sensors measure warpage of glass substrates.
The specular reflection type CDX-L15A is capable of measuring the warpage of transparent glass substrates in units as small as 0.25 μm.
In addition, high-speed measurement is possible thanks to a max.
sampling period of 12.5 μs, enabling sampling that is up to 8 times faster than conventional models.

Measuring deviation of linear guide in X and Z axis by LS series.
Because LS series can measure X and Z axis distance at one time, you can get measurement result of height of the linear guide and edge position in X axis at one time.

Measurement evenness of metal parts by multiple CD22 sensors.
You can align multiple CD22 sensors into narrow space because of its small size so you will be able to get measurement results from multiple sensors at one time which helps reducing installation cost and tact time for production.

Measuring width and warpage of conveyer belt by LS series.
2D displacement sensor can provide height data in 2D, in a line on the conveyer, so it can check width and warpage continuously on line without touching the conveyer.

Measuring sagging of sheet material to control its tension.
CD5-85 will be able to measure the sagging with repeat accuracy of 1um which will make it possible to control keep tension of the sheet accurately and stably.

CD33 can measure warpage of substrate accurately by its C-MOS image sensor.

By using multiple CD5-W85 sensor heads on specular mode, it can measure warpage or thickness of transparent objects precisely.
Multi calculation with one controller makes the measurement quick and easy.

Installed in the inspection equipment of wind-pressure deformation, CD33-250 can measure the warpage of the panel.
Its measurement range is up to 400mm with the resolution 75μm.