Controlling tension of sheet by CD33 series.
Because of its size and weight, you can mount at narrow space. It has long range, 250 +/- 150mm, measurement range, it can control tension of the sheet measuring how long the sheet is warping.

Checking distance of sagging of the metal plate to control its tension by CD22.
It can measure the distance of the metal surface even if it is glossy.

To control picking arm position precisely to handle exposure mask safely, the distance to the measurement of warpage of exposure mask is very important.
The position of transparent exposure mask surface can be measured by specular type of C-MOS laser displacement sensor CD33.