Photoelectric Sensors

Semicon

Silicon Wafer Misalignment Detection

Silicon Wafer Misalignment Detection

The BGS-HDL series enables detection of silicon wafer misalignment on a wafer stage.
Misaligned wafers can be up to 5 mm higher than normal, while the BGS-HDL05T is capable of detecting height differences of 0.08 mm, ensuring high-accuracy performance.

Model: High-resolution C-MOS Laser Sensor  BGS-HDL Series




Long range detection of wafer

Long range detection of wafer

Long range laser BGS sensor TOF-L can detect existence of the wafer on the robot hand.
It can detect the wafer even the wafer position is high or low in 0 to 4.5 meter range.

Model: Long range laser BGS sensor  TOF-L series




Detecting edge of wafer frame

Detecting edge of wafer frame

BGS-HL25t2 can detect very thin object like wafer frame because of its small spot size, φ1mm at 250mm distance from the sensor.

Model: Accurate C-MOS laser sensor  BGS-HL series




Detecting overlapping wafers

Detecting overlapping wafers

BGS-HL has automatic electric shutter function which adjusts sensitivity depends on reflection at the surface of the object that can be utilized for detection of shiny wafer.

Model: Accurate C-MOS laser sensor  BGS-HL series




Detect glass wafer notch

Detect glass wafer notch

By teaching at the notch, the sensor detects only the notch on the wafer and will never get influence from background because it is limited reflective type.

Model: Fiber cable  NF-DC38/DC39




Detecting upper edge of glass/silicon wafers

Detecting upper edge of glass/silicon wafers

Set teaching without work piece using thru-beam side-view type Fiber cable.
Narrow beam of light (approximately 3 degrees angle) minimize stray reflections.

Model: Fiber cable  NF-TG04




Detect glass alignment

Detect glass alignment

Coaxial reflective type with small spot size approximately φ2mm (at distance: 2m) makes it possible to detect transparent glass.
It can adjust sensitivity at optimum value with transparent teaching setting of amplifier D2SA.

Model: Digital laser sensor head  DSR-800




Counting wafers

Counting wafers

Because of small spot size, φ2mm at 2meter distance, enables stable counting wafers without worrying about stray reflections.

Model: Digital amplifier and laser sensor head  D2SA+DSTC-200




Detecting passing FOUP

Detecting passing FOUP

Accurate detection is possible as no dead zone in sensing area.

Model: Transparent object sensor  KR-Q50NW/PW




Detecting lead frame

Detecting lead frame

Beam array type NF-DZ01 can detect lead frame. Its beam lighting can detect without any influences of holes on it.

Model: Screen array fiber cable  NF-DZ01




Detecting glass wafers

Detecting glass wafers

NF-TH06 is set its light axis at 45 degrees angle.
Installation in small space is available as the sleeve length of receiver and emitter is different.

Model: Heat resistant sleeve (Side view) type fiber cable  NF-TH06




Detecting wafers in corrosive environment

Detecting wafers in corrosive environment

Chemical resistant fiber cable NF-TY02 is coated with fluorine resin.
It can detect wafers in corrosive environment.

Model: Chemical resistant fiber cable  NF-TY02




Detection of FOUP

Detection of FOUP

Limited reflection type fiber cable NF-DC38 can detect FOUP even if the FOUP is transparent.

Model: Limited reflection type  NF-DC38




Wafer mapping (1)

Wafer mapping (1)

Narrow view type NF-TG02 has aperture angle of 2°.
It accurately detects a wafer without stray reflection.

Model: Narrow view type, wafers mapping fiber cable  NF-TG02




Wafer mapping (2)

Wafer mapping (2)

Super thin 2mm height Retro-reflective type fiber cable NF-RG01 enables wafer mapping saving space. Complicated wiring process for this fiber cable is not needed.

Model: Narrow-view Wafer mapping  NF-RG01




Wafer mapping (3)

Wafer mapping (3)

Wafer mapping with limited reflection type NF-DC03. Minimum detectable thickness of the wafer is 0.5mm.

Model: Limited reflective type fiber cable  NF-DC03




Detect liquid surface in transparent pipe

Detect liquid surface in transparent pipe

Array type is applied to optical system of NF-DF07 for liquid surface detection.
Stable liquid surface detection is available without getting influences from air bubbles and water drops.

Model: Liquid surface/Liquid leakage/Water detection  NF-DF07




Detect carrier trays in chamber

Detect carrier trays in chamber

Thru-beam type laser sensor ZT-L3000 can detect carrier trays in chamber through small window. Its small spot size realizes accurate positioning.

Model: Built-in amplifier, laser sensor  ZT-L3000




Detecting overlapping silicon wafer

Detecting overlapping silicon wafer

Fiber sensor amplifier D3IF and NF-TW01 can detect overlapping silicon wafers.
Wavelength of the light is 1.45μm which goes through silicon wafer and amount of the light changes depends on thickness of the silicon wafer.

Model: Fiber sensor and fiber cable  D3IF+NF-TW01




Detect overlapping film

Detect overlapping film

Fiber sensor D3IF and specific thru-beam type fiber cable NF-TW01 can detect overlapping films.
As infrared LED applied to D3IF is a wavelength of 1.45μm, stable detection is available.

Model: Liquid surface/liquid leakage/water detection  NF-TW01




Controlling speed of turn table

Controlling speed of turn table

High speed digital fiber sensor amplifier D3RF can be utilized to detect speed of turn table by counting rotation of the turn table for coating stage of solar-cell.
Response time of D3RF is 16micro sec. which is enough speed to detect rotation of the turn table.

Model: High speed digital fiber sensor amplifier  D3RF series