- Silicon Wafer Misalignment Detection
- Long range detection of wafer
- Detecting edge of wafer frame
- Detecting overlapping wafers
- Detect glass wafer notch
- Detecting upper edge of glass/silicon wafers
- Detect glass alignment
- Counting wafers
- Detecting passing FOUP
- Detecting lead frame
- Detecting glass wafers
- Detecting wafers in corrosive environment
- Detection of FOUP
- Wafer mapping (1)
- Wafer mapping (2)
- Detect liquid surface in transparent pipe
- Detect carrier trays in chamber
- Detecting overlapping silicon wafer
- Detect overlapping film
- Controlling speed of turn table
Silicon Wafer Misalignment Detection
The BGS-HDL series enables detection of silicon wafer misalignment on a wafer stage.
Misaligned wafers can be up to 5 mm higher than normal, while the BGS-HDL05T is capable of detecting height differences of 0.08 mm, ensuring high-accuracy performance.
Model: High-resolution C-MOS Laser Sensor BGS-HDL Series
Long range detection of wafer
Long range laser BGS sensor TOF-L can detect existence of the wafer on the robot hand.
It can detect the wafer even the wafer position is high or low in 0 to 4.5 meter range.
Model: Long range laser BGS sensor TOF-L series
Detecting edge of wafer frame
BGS-HL25t2 can detect very thin object like wafer frame because of its small spot size, φ1mm at 250mm distance from the sensor.
Model: Accurate C-MOS laser sensor BGS-HL series
Detecting overlapping wafers
BGS-HL has automatic electric shutter function which adjusts sensitivity depends on reflection at the surface of the object that can be utilized for detection of shiny wafer.
Model: Accurate C-MOS laser sensor BGS-HL series
Detect glass wafer notch
By teaching at the notch, the sensor detects only the notch on the wafer and will never get influence from background because it is limited reflective type.
Model: Fiber cable NF-DC38/DC39
Detecting upper edge of glass/silicon wafers
Set teaching without work piece using thru-beam side-view type Fiber cable.
Narrow beam of light (approximately 3 degrees angle) minimize stray reflections.
Model: Fiber cable NF-TG04
Detect glass alignment
Coaxial reflective type with small spot size approximately φ2mm (at distance: 2m) makes it possible to detect transparent glass.
It can adjust sensitivity at optimum value with transparent teaching setting of amplifier D2SA.
Model: Digital laser sensor head DSR-800
Because of small spot size, φ2mm at 2meter distance, enables stable counting wafers without worrying about stray reflections.
Model: Digital amplifier and laser sensor head D2SA+DSTC-200
Detecting passing FOUP
Accurate detection is possible as no dead zone in sensing area.
Model: Transparent object sensor KR-Q50NW/PW
Detecting lead frame
Beam array type NF-DZ01 can detect lead frame. Its beam lighting can detect without any influences of holes on it.
Model: Screen array fiber cable NF-DZ01
Detecting glass wafers
NF-TH06 is set its light axis at 45 degrees angle.
Installation in small space is available as the sleeve length of receiver and emitter is different.
Model: Heat resistant sleeve (Side view) type fiber cable NF-TH06
Detecting wafers in corrosive environment
Chemical resistant fiber cable NF-TY02 is coated with fluorine resin.
It can detect wafers in corrosive environment.
Model: Chemical resistant fiber cable NF-TY02
Detection of FOUP
Limited reflection type fiber cable NF-DC38 can detect FOUP even if the FOUP is transparent.
Model: Limited reflection type NF-DC38
Wafer mapping (1)
Narrow view type NF-TG02 has aperture angle of 2°.
It accurately detects a wafer without stray reflection.
Model: Narrow view type, wafers mapping fiber cable NF-TG02
Wafer mapping (2)
Wafer mapping with limited reflection type NF-DC03. Minimum detectable thickness of the wafer is 0.5mm.
Model: Limited reflective type fiber cable NF-DC03
Detect liquid surface in transparent pipe
Array type is applied to optical system of NF-DF07 for liquid surface detection.
Stable liquid surface detection is available without getting influences from air bubbles and water drops.
Model: Liquid surface/Liquid leakage/Water detection NF-DF07
Detect carrier trays in chamber
Thru-beam type laser sensor ZT-L3000 can detect carrier trays in chamber through small window. Its small spot size realizes accurate positioning.
Model: Built-in amplifier, laser sensor ZT-L3000
Detecting overlapping silicon wafer
Fiber sensor amplifier D3IF and NF-TW01 can detect overlapping silicon wafers.
Wavelength of the light is 1.45μm which goes through silicon wafer and amount of the light changes depends on thickness of the silicon wafer.
Model: Fiber sensor and fiber cable D3IF+NF-TW01
Detect overlapping film
Fiber sensor D3IF and specific thru-beam type fiber cable NF-TW01 can detect overlapping films.
As infrared LED applied to D3IF is a wavelength of 1.45μm, stable detection is available.
Model: Liquid surface/liquid leakage/water detection NF-TW01
Controlling speed of turn table
High speed digital fiber sensor amplifier D3RF can be utilized to detect speed of turn table by counting rotation of the turn table for coating stage of solar-cell.
Response time of D3RF is 16micro sec. which is enough speed to detect rotation of the turn table.
Model: High speed digital fiber sensor amplifier D3RF series
- Electronics Components
- Detecting existence
- Counting/Detecting passing
- Detecting direction/sides
- Detecting height/level difference
- Detecting overlapping
- Detecting protruding
- Detecting meandering
- Detecting wrong objects
- Detecting black/glossy objects
- Detecting liquid
- Long range detection
- Pin-point detection
- Detecting transparent objects
- Environmental resistant
- Detecting color and mark