濺鍍靶材厚度的測量

The thickness of a sputtering target is measured with the CD5-30 laser displacement sensor. True measurement stability is achieved thanks to OPTEX FA’s newly developed “Tri-CORE” technology. In specular reflective mode, the sensor delivers repeatability of 0.1 µm, enabling high-precision measurement. This suppresses sputtering target unevenness and contributes to improved accuracy during film deposition.

• 高性能多單元雷射位移計

  CD5系列

  精度、穩定性和可操作性的更高層次整合