스퍼터링 타겟의 두께 측정

The thickness of a sputtering target is measured with the CD5-30 laser displacement sensor. True measurement stability is achieved thanks to OPTEX FA’s newly developed “Tri-CORE” technology. In specular reflective mode, the sensor delivers repeatability of 0.1 µm, enabling high-precision measurement. This suppresses sputtering target unevenness and contributes to improved accuracy during film deposition.

• 고성능 다중 유닛 레이저 변위 센서

  CD5 시리즈

  정확성, 안정성 및 조작성의 차세대 통합