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Displacement sensor Process improvement

Electricity, electric component industry

Detect the thickness of sputtering target

Detect the thickness of sputtering target

CD5-30 detects the thickness of sputtering target.
OPTEX FA newly developed technology of "Tri-CORE" realize stability.
Mirror reflective mode and repeatability of 0.1μm result in improving accuracy.

Model nameLaser displacement sensorCD5-30